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Browsing by  AuthorNam, GJ
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Article
Effects of annealing in O-2 and N-2 on the microstructure of metal organic chemical vapor deposition Ta2O5 film and the interfacial SiO2 layer
SCIE
SCOPUS
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, vol. 10, no. 2, page. 113 - 119, 1999-04
Park, YB
;
Li, XD
;
Nam, GJ
;
Rhee, SW
1
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