Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LIM, GEUN BAE | - |
| dc.contributor.author | KIM, KANGHYUN | - |
| dc.contributor.author | 박병규 | - |
| dc.contributor.author | 오현택 | - |
| dc.contributor.author | 이진균 | - |
| dc.contributor.author | 이상설 | - |
| dc.date.accessioned | 2020-01-03T06:52:48Z | - |
| dc.date.available | 2020-01-03T06:52:48Z | - |
| dc.date.created | 2019-12-17 | - |
| dc.date.issued | 2019-08-21 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/100615 | - |
| dc.publisher | 한국광학회 | - |
| dc.relation.isPartOf | 2019 차세대 리소그래피 학술대회 | - |
| dc.relation.isPartOf | 2019 차세대 리소그래피 학술대회 | - |
| dc.title | Prediction study of the theoretical contrast of extreme ultraviolet photoresist by electron beam and EUV exposure test | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 2019 차세대 리소그래피 학술대회 | - |
| dc.citation.conferenceDate | 2019-08-21 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 2019 차세대 리소그래피 학술대회 | - |
| dc.contributor.affiliatedAuthor | LIM, GEUN BAE | - |
| dc.contributor.affiliatedAuthor | KIM, KANGHYUN | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg