DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, JL | - |
dc.date.accessioned | 2015-06-25T02:10:30Z | - |
dc.date.available | 2015-06-25T02:10:30Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 1999-01-15 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.other | 2015-OAK-0000000534 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/10487 | - |
dc.description.abstract | A novel technique for sulfur doping to GaAs was demonstrated. The surface of GaAs was treated with (NH4)(2)S-x solution, subsequent to annealing using either furnace or rapid thermal processing. Sulfur atoms adsorbed at the surface of GaAs during the (NH4)(2)S-x treatment diffuse into GaAs during the annealing. The diffusion profiles of sulfur in both types of annealing treatments show a concave shape from the GaAs surface. Diffusion constants of sulfur determined using the Boltzmann-Matano technique increase with the decrease of sulfur concentration via the depth from the surface of GaAs. This suggests that immobile sulfur donor S-As(+) forms at the near surface interacts with a Ga divacancy, and results in the production of mobile As interstitials, I-As. The I-As moves fast toward the inside of GaAs and kickout the S-As(+) donor, producing a fast diffusing species of interstitial S atoms. The diffusion coefficients of sulfur determined are 2.5X10(-14) cm(2)/s at 840 degrees C and 5X10(-12) cm(2)/s at 900 degrees C. The sulfur doping technique is applied to the fabrication of metal-semiconductor field-effect transistors (MESFETs). The MESFETs with 1.0 mu m gate length exhibit transconductance of 190 mS/mm, demonstrating the applicability of this technique to the formation of active channel layer of MESFETs. (C) 1999 American Institute of Physics. [S0021-8979(99)09002-7]. | - |
dc.description.statementofresponsibility | open | en_US |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.relation.isPartOf | JOURNAL OF APPLIED PHYSICS | - |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | Sulfur doping of GaAs with (NH4)(2)S-x solution | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | en_US |
dc.identifier.doi | 10.1063/1.369164 | - |
dc.author.google | LEE, JL | en_US |
dc.relation.volume | 85 | en_US |
dc.relation.issue | 2 | en_US |
dc.relation.startpage | 807 | en_US |
dc.relation.lastpage | 811 | en_US |
dc.contributor.id | 10105416 | en_US |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | en_US |
dc.relation.index | SCI급, SCOPUS 등재논문 | en_US |
dc.relation.sci | SCI | en_US |
dc.collections.name | Journal Papers | en_US |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | JOURNAL OF APPLIED PHYSICS, v.85, no.2, pp.807 - 811 | - |
dc.identifier.wosid | 000077792600025 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 811 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 807 | - |
dc.citation.title | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 85 | - |
dc.contributor.affiliatedAuthor | Lee, JL | - |
dc.identifier.scopusid | 2-s2.0-0000390772 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 15 | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | (NH4)2SX-TREATED GAAS | - |
dc.subject.keywordPlus | IMPLANTED GAAS | - |
dc.subject.keywordPlus | DIFFUSION | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
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