Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma
SCIE
SCOPUS
- Title
- Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma
- Authors
- You, SJ; Kim, HC; Chung, CW; Chang, HY; Lee, JK
- Date Issued
- 2003-12-15
- Publisher
- AMER INST PHYSICS
- Abstract
- We measured electrical characteristics of capacitively coupled plasma at low pressure (2.67 Pa) with different driving frequencies. From these measurements, we observed a significant change in discharge power characteristics during the frequency increase. While increasing the frequency, a square dependence of power characteristics (Psimilar toI(2)) changes to a linear dependence (Psimilar toI). This observed result reflects that a power dissipation mode transition from an ion-dominated dissipation mode to an electron-dominated dissipation mode takes place during the driving frequency increase. Both the results calculated from a simple sheath model and a particle-in-cell simulation are in a good agreement with the experimental data. (C) 2003 American Institute of Physics.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/10522
- DOI
- 10.1063/1.1621085
- ISSN
- 0021-8979
- Article Type
- Article
- Citation
- JOURNAL OF APPLIED PHYSICS, vol. 94, no. 12, page. 7422 - 7426, 2003-12-15
- Files in This Item:
-
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.