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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | AN, JEHYUN | - |
| dc.contributor.author | CHOI, KYEONG KEUN | - |
| dc.contributor.author | KANG, BOHYEON | - |
| dc.contributor.author | BAEK, ROCK HYUN | - |
| dc.date.accessioned | 2021-06-01T09:55:08Z | - |
| dc.date.available | 2021-06-01T09:55:08Z | - |
| dc.date.created | 2021-03-04 | - |
| dc.date.issued | 2020-07-01 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/106213 | - |
| dc.language | English | - |
| dc.publisher | NANO KOREA | - |
| dc.relation.isPartOf | The 18th International Nanotech Symposium & Exhibition | - |
| dc.relation.isPartOf | The 18th International Nanotech Symposium & Exhibition | - |
| dc.title | Interface trap curing effects on high-k gate stack (Al/Al2O3/Si-sub) by rapid thermal anneal (RTA) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | The 18th International Nanotech Symposium & Exhibition | - |
| dc.citation.conferenceDate | 2020-07-01 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 경기도 고양시 KINTEX 제1전시장(온라인학회) | - |
| dc.citation.title | The 18th International Nanotech Symposium & Exhibition | - |
| dc.contributor.affiliatedAuthor | AN, JEHYUN | - |
| dc.contributor.affiliatedAuthor | CHOI, KYEONG KEUN | - |
| dc.contributor.affiliatedAuthor | KANG, BOHYEON | - |
| dc.contributor.affiliatedAuthor | BAEK, ROCK HYUN | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg