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TSV-to-Transistor Noise Coupling Characterizations for Sub 5-nm Node Fin- and Nanosheet FETs in 3D-IC
- Title
- TSV-to-Transistor Noise Coupling Characterizations for Sub 5-nm Node Fin- and Nanosheet FETs in 3D-IC
- Date Issued
- 2020-07-01
- Publisher
- NANO KOREA
- Article Type
- Conference
- Citation
- The 18th International Nanotech Symposium & Exhibition, 2020-07-01
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg