Ultra-Highly-Integrated Waveguide Based On Active Meta-Materials
- Title
- Ultra-Highly-Integrated Waveguide Based On Active Meta-Materials
- Authors
- KO, BYOUNG SU; Sung-Hoon Hong; Junsuk Rho
- Date Issued
- 2020-02-14
- Publisher
- 연세대학교, 한국반도체산업협회, 한국반도체연구조합
- Abstract
- Photonic devices are promising research areas that leading the technical innovation paradigm. It is rapidly
developing with the development of the latest nano-fabrication technologies. Meta-materials, which are
designed nano-pattern array to have designed optical properties, have been investigated to achieve the
miniaturization of photonic devices. The use of meta-materials allows for miniaturization and that enables
ultra-highly integrated photonic devices. Here, we attempt a novel nano-fabrication approach to achieve
ultra-compact waveguide device. Firstly, we fabricate a nano-cavity in the commercial waveguide vertically
to control the permittivity (ε) at the optical telecom wavelength (1300-1550 nm). And then we deposit the
meta-materials based on phase change material (PCM) Ge-Sb-Te (GST), VO2. PCM has a property that
changes in permittivity depending on the phase state and can control by electrical signals. In here, we can
consider to being planar planes with an effective permittivity ( 𝜀𝑒𝑓𝑓 ) based on the ‘Maxwell-Garnett
approximation’ [1]. This approach can sharply control 𝜀𝑒𝑓𝑓 of the waveguide by PCM-filling inside the
waveguide, and directly control the optical path or filter, thereby enabling the ultra-high-density and active
property of optical waveguide. Our approach can apply to diverse fields that require active optical properties
devices.
Acknowledgments This work was supported by the Electronics and Telecommunications Research Institute, grant-funded by
the Korean government (18ZB1100, Development of Basic Technologies for 3D Photo-Electronics).
References [1] Introduction to the Maxwell Garnett approximation: tutorial (2016).
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/106308
- Article Type
- Conference
- Citation
- 한국반도체학술대회, 2020-02-14
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.