DC Field | Value | Language |
---|---|---|
dc.contributor.author | KIM, KANGHYUN | - |
dc.contributor.author | LIM, GEUN BAE | - |
dc.contributor.author | KIM, JONG HYUN | - |
dc.contributor.author | NAM, HYORYUNG | - |
dc.contributor.author | KIM, SU HYEON | - |
dc.date.accessioned | 2021-09-03T03:57:33Z | - |
dc.date.available | 2021-09-03T03:57:33Z | - |
dc.date.created | 2021-06-17 | - |
dc.date.issued | 2021-05 | - |
dc.identifier.issn | 1225-5475 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/106842 | - |
dc.description.abstract | As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS. | - |
dc.language | Korean | - |
dc.publisher | 한국센서학회 | - |
dc.relation.isPartOf | Journal of Sensor Science and Technology | - |
dc.title | 엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용 | - |
dc.title.alternative | X-ray grayscale lithography for sub-micron lines with cross sectional hemisphere for Bio-MEMS application | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | Journal of Sensor Science and Technology, v.30, no.3, pp.170 - 174 | - |
dc.identifier.kciid | ART002722405 | - |
dc.citation.endPage | 174 | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 170 | - |
dc.citation.title | Journal of Sensor Science and Technology | - |
dc.citation.volume | 30 | - |
dc.contributor.affiliatedAuthor | KIM, KANGHYUN | - |
dc.contributor.affiliatedAuthor | LIM, GEUN BAE | - |
dc.contributor.affiliatedAuthor | KIM, JONG HYUN | - |
dc.contributor.affiliatedAuthor | NAM, HYORYUNG | - |
dc.contributor.affiliatedAuthor | KIM, SU HYEON | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
dc.description.isOpenAccess | N | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Bio-MEMS | - |
dc.subject.keywordAuthor | X-ray grayscale lithography | - |
dc.subject.keywordAuthor | Tilted gold absorber | - |
dc.subject.keywordAuthor | PDMS | - |
dc.subject.keywordAuthor | Microfluidics | - |
dc.subject.keywordAuthor | Cell patterning | - |
dc.description.journalRegisteredClass | kci | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
library@postech.ac.kr Tel: 054-279-2548
Copyrights © by 2017 Pohang University of Science ad Technology All right reserved.