Pyrolysis mechanism of silanes, difluorosilane, and their mixtures
SCIE
SCOPUS
- Title
- Pyrolysis mechanism of silanes, difluorosilane, and their mixtures
- Authors
- Han, JH; Rhee, SW; Moon, SH
- Date Issued
- 1996-06
- Publisher
- ELECTROCHEMICAL SOC INC
- Abstract
- Pyrolysis of silanes, difluorosilane, and their mixtures has been observed by mass spectroscopy under isothermal conditions. The rates of SiH4 pyrolysis show a large compensation effect at low pressure, which agrees with the theory of unimolecular reaction. The pyrolysis rates of difluorosilane and silanes are enhanced synergistically when they are mixed together. The reaction mechanism proposed in this study for pyrolysis of the Si-containing species explains the observed experimental results well.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/11077
- DOI
- 10.1149/1.1836938
- ISSN
- 0013-4651
- Article Type
- Article
- Citation
- JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 143, no. 6, page. 1996 - 2002, 1996-06
- Files in This Item:
-
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.