DC Field | Value | Language |
---|---|---|
dc.contributor.author | PARK, HYUK | - |
dc.contributor.author | JUYOUNG, YUN | - |
dc.contributor.author | CHUNG, YOONYOUNG | - |
dc.date.accessioned | 2023-02-20T05:22:14Z | - |
dc.date.available | 2023-02-20T05:22:14Z | - |
dc.date.created | 2023-02-20 | - |
dc.date.issued | 2022-06-28 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/115305 | - |
dc.description.abstract | © 2022. John Wiley and Sons Inc. AIAA. All rights reserved.We improved the contact properties by inserting a self-assembled monolayer at the interface between a-IGZO and metal electrode. For high-resolution and high-speed displays, the transistor channel length needs to be reduced without short channel effects. In case of Al electrode, it easily diffuses into a-IGZO and forms AlOx at the interface, resulting in a considerable contact resistance increase. In our approach, we successfully suppressed Al diffusion by self-assembled monolayer treatment on a-IGZO thin film. The thickness of AlOx was significantly reduced, which was verified by transmission electron microscopy images. With a proper self-assembled monolayer treatment, the contact resistance was decreased by 36%. | - |
dc.publisher | SID | - |
dc.relation.isPartOf | SID Symposium Digest of Technical Papers | - |
dc.title | Effects of Self-Assembled Monolayer on Contact Resistance Between IGZO and Electrode for High-Resolution Display | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | SID Symposium Digest of Technical Papers, pp.1118 - 1121 | - |
dc.citation.conferenceDate | 2022-06-28 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.endPage | 1121 | - |
dc.citation.startPage | 1118 | - |
dc.citation.title | SID Symposium Digest of Technical Papers | - |
dc.contributor.affiliatedAuthor | PARK, HYUK | - |
dc.contributor.affiliatedAuthor | JUYOUNG, YUN | - |
dc.contributor.affiliatedAuthor | CHUNG, YOONYOUNG | - |
dc.identifier.scopusid | 2-s2.0-85135611214 | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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