Direct Conformal Growth of Hexagonal Boron Nitride on High-aspect-ratio Silicon-based Nanotrenches
- Title
- Direct Conformal Growth of Hexagonal Boron Nitride on High-aspect-ratio Silicon-based Nanotrenches
- Authors
- KIM, JONG KYU
- Date Issued
- 2022-10-10
- Publisher
- The Alliance of Science Organisations in Germany
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/115733
- Article Type
- Conference
- Citation
- International Workshop on Nitride Semiconductors (IWN), 2022-10-10
- Files in This Item:
- There are no files associated with this item.
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