DC and AC Sensing Characteristics of Si-nanowire FET for Urea Detection
- Title
- DC and AC Sensing Characteristics of Si-nanowire FET for Urea Detection
- Authors
- 박지원
- Date Issued
- 2022
- Publisher
- 포항공과대학교
- Abstract
- Urea, a product of the urea cycle, is one of the important biomarkers for
medical diagnosis. The urea concentration is specifically critical for disease
diagnosis related to kidney and liver. Here, a Si-nanowire field-effect transistor
(SiNW FET) was fabricated using a top-down method and characterized to
detect the urea. The SiNW FET has advantages of high sensitivity,
compatibility with conventional CMOS fabrication, low cost, and mass
production. The devices were functionalized using 3-
Aminopropyltriethoxysilane (APTES) and Glutaraldehyde (GA) to facilitate
the binding of urease. DC and AC characterizations were conducted to evaluate
the sensing performances. From DC characteristics, the voltage-related and
current-related sensitivities were extracted with various concentrations in the
range of 100 μM ~ 100 mM. Selectivity tests without urease immobilization
and reaction with other types of samples were also conducted at room
temperature. From the AC measurement, the ratio of VOUT (=VOUT.AFTER
/VOUT.BEFORE) increases as the urea increases at the frequency to 1 kHz and then
saturates at the frequency above 10 kHz. Depending on DC and AC operation,
the limit of detection (LOD) is also characterized and analyzed.
- URI
- http://postech.dcollection.net/common/orgView/200000597532
https://oasis.postech.ac.kr/handle/2014.oak/117214
- Article Type
- Thesis
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