강성도 국부 변환 신축성 기판 위에 제작된 박막 트랜지스터 기반 변형률 센서

Abstract

Stiffness-engineered stretchable substrate technology has been widely used to produce stretchable displays, transistors, and integratedcircuits because it is compatible with various flexible electronics technologies. However, the stiffness-engineering technology has neverbeen applied to transistor-based stretchable strain sensors. In this study, we developed thin-film transistor-based strain sensors on stiffness-engineered stretchable substrates. We designed and fabricated strain-sensitive stretchable resistors capable of inducing changes indrain currents of transistors when subjected to stretching forces. The resistors and source electrodes of the transistors were connectedin series to integrate the developed stretchable resistors with thin-film transistors on stretchable substrates by printing the resistors afterfabricating transistors. The thin-film transistor-based stretchable strain sensors demonstrate feasibility as strain sensors operating understrains of 0%–5%. This strain range can be extended with further investigations. The proposed stiffness-engineering approach willexpand the potential for the advancement and manufacturing of innovative stretchable strain sensors.