Effective viscosity model for electron heating in warm magnetized inductively coupled plasma discharges

Abstract

An effective viscosity model for warm magnetized inductively coupled plasma (MICP) discharges has been derived. It calculates the power absorbed inside MICP discharges that takes nonlocal behavior into account with the help of effective viscosity terms in the momentum equations for right-handed and left-handed components of the wave. The validity of this model for warm MICP discharges has been checked by comparing it with self-consistent kinetic model for warm MICP discharges. This effective viscosity model shows nonmonotonic decay for right- and left-handed components of the electric field inside MICP discharges. It also shows regions of negative power absorption which cannot be shown using conventional fluid models. The power absorbed per unit area (for right- and left-handed components) calculated using effective viscosity model is similar to that calculated using computationally extensive kinetic models over a wide range of MICP discharge conditions. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3208694]