Effects of Mg doping to optimize the properties of ZnO:Al for transparent conductive oxide (TCO) films

Abstract

In order to achieve good conductivity and high transmittance of transparent conductive oxide (TCO), we attempted to fabricate Mg-doped ZnO:Al (AZO) films and analyzed their structural, electrical, and optical properties. The Mg-doped AZO films were successfully deposited on top of the glass substrates by using an ion beam sputter system. The Mg concentration was controlled by varying the number of MgO chips attached on the AZO target. Inductively coupled plasma mass spectrometry (ICP-MS) was used to determine the concentration of Mg incorporated into the AZO films. The structural, electrical, and optical properties of the Mg-doped AZO films were found to depend on the Mg concentration. As the Mg concentration increased, the optical band gap also increased because of the replacement of Mg with Zn in the TCO films. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim