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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, KJ | - |
| dc.contributor.author | Chung, S | - |
| dc.contributor.author | Ihm, K | - |
| dc.contributor.author | Kang, TH | - |
| dc.contributor.author | Choi, YW | - |
| dc.contributor.author | Han, YH | - |
| dc.contributor.author | Yang, KH | - |
| dc.contributor.author | Lee, BC | - |
| dc.date.accessioned | 2016-03-31T09:47:37Z | - |
| dc.date.available | 2016-03-31T09:47:37Z | - |
| dc.date.created | 2011-04-18 | - |
| dc.date.issued | 2011-01 | - |
| dc.identifier.issn | 0374-4884 | - |
| dc.identifier.other | 2011-OAK-0000023382 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/17560 | - |
| dc.description.abstract | The surface properties of Al thin films (500 angstrom) modified by irradiation with high-energy electron beams (0.3, 1, or 2 MeV with a flux of 7 x 10(8) electrons.cm(-2).s(-1)) have been investigated using synchrotron-radiation photoelectron emission spectroscopy. No morphological changes were observed, but increased oxidation of the Al films was observed when they were irradiated for longer than 40 min. Selective oxidation of the irradiated regions of the Al films was achieved using shadow masking. A scanning photoemission electron microscopy image at the O l s core level clearly showed spatially resolved oxidation contrast in the Al layer. | - |
| dc.description.statementofresponsibility | X | - |
| dc.language | English | - |
| dc.publisher | KOREAN PHYSICAL SOC | - |
| dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.subject | E-beam | - |
| dc.subject | Oxidation of aluminum | - |
| dc.subject | X-ray spectroscopy | - |
| dc.subject | LITHOGRAPHY | - |
| dc.subject | FABRICATION | - |
| dc.subject | GROWTH | - |
| dc.subject | LASER | - |
| dc.title | High-energy-electron-beam Induced Oxidation of an Aluminum Film | - |
| dc.type | Article | - |
| dc.contributor.college | 물리학과 | - |
| dc.identifier.doi | 10.3938/JKPS.58.109 | - |
| dc.author.google | Lee, KJ | - |
| dc.author.google | Chung, S | - |
| dc.author.google | Ihm, K | - |
| dc.author.google | Kang, TH | - |
| dc.author.google | Choi, YW | - |
| dc.author.google | Han, YH | - |
| dc.author.google | Yang, KH | - |
| dc.author.google | Lee, BC | - |
| dc.relation.volume | 58 | - |
| dc.relation.issue | 1 | - |
| dc.relation.startpage | 109 | - |
| dc.relation.lastpage | 111 | - |
| dc.contributor.id | 10071841 | - |
| dc.relation.journal | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.relation.index | SCI급, SCOPUS 등재논문 | - |
| dc.relation.sci | SCI | - |
| dc.collections.name | Journal Papers | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.58, no.1, pp.109 - 111 | - |
| dc.identifier.wosid | 000288414300021 | - |
| dc.date.tcdate | 2018-03-23 | - |
| dc.citation.endPage | 111 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 109 | - |
| dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.citation.volume | 58 | - |
| dc.contributor.affiliatedAuthor | Chung, S | - |
| dc.identifier.scopusid | 2-s2.0-78751517440 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
| dc.description.scptc | 0 | * |
| dc.date.scptcdate | 2018-05-121 | * |
| dc.type.docType | Article | - |
| dc.subject.keywordPlus | LITHOGRAPHY | - |
| dc.subject.keywordPlus | FABRICATION | - |
| dc.subject.keywordPlus | GROWTH | - |
| dc.subject.keywordPlus | LASER | - |
| dc.subject.keywordAuthor | E-beam | - |
| dc.subject.keywordAuthor | Oxidation of aluminum | - |
| dc.subject.keywordAuthor | X-ray spectroscopy | - |
| dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.relation.journalResearchArea | Physics | - |
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Related Researcher
- 정석민CHUNG, SUK MIN
- Dept of Physics