Deposition and mechanical evaluation of superhard Ti-Al-Si-N nanocomposite films by a hybrid coating system
SCIE
SCOPUS
- Title
- Deposition and mechanical evaluation of superhard Ti-Al-Si-N nanocomposite films by a hybrid coating system
- Authors
- Park, IW; Choi, SR; Suh, JH; Park, CG; Kim, KH
- Date Issued
- 2004-01-30
- Publisher
- ELSEVIER SCIENCE SA
- Abstract
- New superhard Ti-Al-Si-N films, characterized by a nanocomposite comprising nano-sized (Ti,Al,Si)N crystallites embedded in amorphous Si3N4 matrix, could be successfully synthesized on WC-Co substrates by a hybrid coating system of arc ion plating (AIP) and sputtering method. The hardness and Young's modulus value of the Ti-Al-Si-N film increased with incorporation of Si, and had the maximum value of similar to55 GPa and similar to650 GPa at the Si content of 9 at.%, respectively. The average friction coefficient of the Ti-Al-Si-N films largely decreased with an increase of the Si content. This behavior would be attributed to the tribo-chemical reaction between Si and ambient humidity, which enabled to form SiO2 or Si(OH)(2) tribo-layer playing a role as self-lubricant. The harder Ti-Al-Si-N film was found to be more wear-resistant against steel. A systematic work on the microstructure and mechanical properties of Ti-Al-Si-N films is reported in this paper. (C) 2003 Elsevier B.V. All rights reserved.
- Keywords
- Ti-Al-Si-N; superhard; nanocomposite; hybrid coating system; mechanical evaluation; ION PLATING METHOD; NITRIDE; WEAR; MICROSTRUCTURE; LAYER; PERFORMANCE; BEHAVIOR; SILICON
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/18081
- DOI
- 10.1016/S0040-6090(0
- ISSN
- 0040-6090
- Article Type
- Article
- Citation
- THIN SOLID FILMS, vol. 447, page. 443 - 448, 2004-01-30
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