Spatial and energy distribution of Co, Ag and Pt particles in pulsed laser deposition: in view of the fabrication of nanometer multilayer film
SCIE
SCOPUS
- Title
- Spatial and energy distribution of Co, Ag and Pt particles in pulsed laser deposition: in view of the fabrication of nanometer multilayer film
- Authors
- Kang, DW; Jeon, IJ; Song, JS; Kim, D
- Date Issued
- 2003-08
- Publisher
- SPRINGER-VERLAG
- Abstract
- The measurement of thickness profiles of films (Co, Ag, Pt) with an ellipsometer, and the time-of-flight measurement, were used to investigate the spatial distribution of laser-ablated Co, Ag and Pt particles. Near a target, the spatial distribution shows the material dependence: it was observed that Co has the broadest distribution, and Ag has the narrowest distribution. However, at a distance far from the target, the distribution becomes independent of the materials. The time-of-flight measurement reveals that the kinetic energy distribution of ions is anisotropic and Co has a less anisotropic distribution than Ag. This study leads us to the optimum conditions for the fabrication of nm multi-layer (ML) films with good quality, which was confirmed by the fabrication of Co/Pt nm ML films.
- Keywords
- ANGULAR-DISTRIBUTION; OXIDE-FILMS; SILVER IONS; AMBIENT GAS; THIN-FILMS; ABLATION; VACUUM; COMPONENT; TARGET; METAL
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/18439
- DOI
- 10.1007/s00339-002-1457-x
- ISSN
- 0947-8396
- Article Type
- Article
- Citation
- APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, vol. 77, no. 3-4, page. 449 - 453, 2003-08
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