The effect of additives on the viscosity of dimethylaluminum hydride and FTIR diagnostics of the gas-phase reaction
SCIE
SCOPUS
- Title
- The effect of additives on the viscosity of dimethylaluminum hydride and FTIR diagnostics of the gas-phase reaction
- Authors
- Lee, JH; Park, MY; Yun, JH; Rhee, SW
- Date Issued
- 1999-07-06
- Publisher
- ELSEVIER SCIENCE SA
- Abstract
- The effect of additives on the viscosity of liquid-phase dimethylaluminum hydride (DMAH) was investigated. The viscosity of pure liquid-phase DMAH was measured to be 6400 cp (centipoise) but the viscosity of liquid-phase DMAH was drastically reduced down to 50 cp with the addition of 2.7 mol% diethylphenylphosphine, 60 cp with 0.4 mol% tribenzylphosphine, 70 cp with 2.4 mol% trihexylamine, and 30 cp with 1.4 mol% 3-benzylpyridine. The electron donating ability and steric effect of the additives are believed to be the most important factors in lowering the viscosity of DMAH. By reducing the viscosity of liquid-phase DMAH, the bubbling efficiency was significantly improved. State of gas-phase DMAH was also monitored by in situ Fourier transform infrared spectroscopy (FTIR). In the gas phase, trimeric form and hydrogen-bridged dimeric form of DMAH were observed up to 170 degrees C and between 170 degrees C and 250 degrees C only hydrogen-bridged dimer was observed. Above 250 degrees C, methyl-bridged dimer appeared and above 320 degrees C methane and aluminum was observed from the dissociation of DMAH. (C) 1999 Elsevier Science S.A. All rights reserved.
- Keywords
- aluminum; dimethylaluminum hydride; Fourier transform infrared spectroscopy; viscosity; additive; CHEMICAL-VAPOR-DEPOSITION; REACTION-MECHANISM; ALUMINUM; COPPER; GROWTH; AL
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/21080
- DOI
- 10.1016/S0040-6090(99)00028-0
- ISSN
- 0040-6090
- Article Type
- Article
- Citation
- THIN SOLID FILMS, vol. 348, no. 1-2, page. 130 - 133, 1999-07-06
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