DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, W | - |
dc.contributor.author | Han, H | - |
dc.contributor.author | Lotnyk, A | - |
dc.contributor.author | Schubert, MA | - |
dc.contributor.author | Senz, S | - |
dc.contributor.author | Alexe, M | - |
dc.contributor.author | Hesse, D | - |
dc.contributor.author | Baik, S | - |
dc.contributor.author | Gosele, U | - |
dc.date.accessioned | 2016-04-01T01:15:08Z | - |
dc.date.available | 2016-04-01T01:15:08Z | - |
dc.date.created | 2009-08-11 | - |
dc.date.issued | 2008-07 | - |
dc.identifier.issn | 1748-3387 | - |
dc.identifier.other | 2008-OAK-0000007981 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/22613 | - |
dc.description.abstract | Ferroelectric materials have emerged in recent years as an alternative to magnetic and dielectric materials for nonvolatile data-storage applications(1-5). Lithography is widely used to reduce the size of data-storage elements in ultrahigh-density memory devices(6-9). However, ferroelectric materials tend to be oxides with complex structures that are easily damaged by existing lithographic techniques, so an alternative approach is needed to fabricate ultrahigh-density ferroelectric memories. Here we report a high-temperature deposition process that can fabricate arrays of individually addressable metal/ferroelectric/metal nanocapacitors with a density of 176 Gb inch(-2). The use of an ultrathin anodic alumina membrane as a lift-off mask makes it possible to deposit the memory elements at temperatures as high as 650 degrees C, which results in excellent ferroelectric properties. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | NATURE PUBLISHING GROUP | - |
dc.relation.isPartOf | NATURE NANOTECHNOLOGY | - |
dc.subject | POROUS ALUMINA MEMBRANES | - |
dc.subject | THIN-FILMS | - |
dc.subject | ANODIC ALUMINA | - |
dc.subject | SINGLE-DOMAIN | - |
dc.subject | PORE ARRAYS | - |
dc.subject | FABRICATION | - |
dc.subject | IMPRINT | - |
dc.subject | SIZE | - |
dc.subject | MICROSCOPY | - |
dc.subject | CAPACITORS | - |
dc.title | Individually addressable epitaxial ferroelectric nanocapacitor arrays with near Tb inch(-2) density | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | - |
dc.identifier.doi | 10.1038/NNANO.2008.161 | - |
dc.author.google | Lee, W | - |
dc.author.google | Han, H | - |
dc.author.google | Lotnyk, A | - |
dc.author.google | Schubert, MA | - |
dc.author.google | Senz, S | - |
dc.author.google | Alexe, M | - |
dc.author.google | Hesse, D | - |
dc.author.google | Baik, S | - |
dc.author.google | Gosele, U | - |
dc.relation.volume | 3 | - |
dc.relation.issue | 7 | - |
dc.relation.startpage | 402 | - |
dc.relation.lastpage | 407 | - |
dc.contributor.id | 10078291 | - |
dc.relation.journal | NATURE NANOTECHNOLOGY | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | NATURE NANOTECHNOLOGY, v.3, no.7, pp.402 - 407 | - |
dc.identifier.wosid | 000257984700011 | - |
dc.date.tcdate | 2018-12-01 | - |
dc.citation.endPage | 407 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | 402 | - |
dc.citation.title | NATURE NANOTECHNOLOGY | - |
dc.citation.volume | 3 | - |
dc.contributor.affiliatedAuthor | Baik, S | - |
dc.identifier.scopusid | 2-s2.0-46749126491 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 218 | - |
dc.description.scptc | 214 | * |
dc.date.scptcdate | 2018-05-121 | * |
dc.type.docType | Article | - |
dc.subject.keywordPlus | POROUS ALUMINA MEMBRANES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | ANODIC ALUMINA | - |
dc.subject.keywordPlus | SINGLE-DOMAIN | - |
dc.subject.keywordPlus | PORE ARRAYS | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | IMPRINT | - |
dc.subject.keywordPlus | SIZE | - |
dc.subject.keywordPlus | MICROSCOPY | - |
dc.subject.keywordPlus | CAPACITORS | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
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