Particle simulation of a magnetically enhanced dual-frequency capacitively coupled plasma

Abstract

One-dimensional particle-in-cell/Monte Carlo simulations have been carried out to investigate the magnetic field effects on the asymmetric dual-frequency (27 and 2 MHz) capacitive discharge. Variations of the plasma characteristics such as plasma density, electrical property and ion-energy-distribution functions (IEDFs) for the various magnetic fields are examined. The increase in the magnetic field up to a few tens of gauss is found to increase the width of the IEDF and the plasma density. However, for a larger magnetic field less than 125 G, the width of the IEDF is found to be continuously decreasing with the reduction of the high-frequency-averaged sheath potential, while the plasma density increases.