DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim, SJ | - |
dc.contributor.author | Kwon, SJ | - |
dc.contributor.author | Kim, H | - |
dc.contributor.author | Park, JS | - |
dc.date.accessioned | 2016-04-01T01:30:36Z | - |
dc.date.available | 2016-04-01T01:30:36Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 2007-10-29 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.other | 2007-OAK-0000007279 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/23090 | - |
dc.description.abstract | High performance thin film transistor (TFT) with atomic layer deposition (ALD) nitrogen doped ZnO (ZnO:N) as an active layer is demonstrated. The electrical properties of ZnO thin films were effectively controlled by in situ nitrogen doping using NH4OH as a source for reactants. Especially, the electron concentration in ZnO was lowered to below 10(15) cm(-3). Good device characteristics were obtained from the inverted staggered type TFTs with ZnO:N channel and ALD Al2O3 gate insulator; mu(sat)=6.7 cm(2)/V s, I-off=2.03x10(-12) A, I-on/off=9.46x10(7), and subthreshold swing=0.67 V/decade. The entire TFT fabrication processes were carried out at below 150 degrees C, which is a favorable process for plastic based flexible display. (C) 2007 American Institute of Physics. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.relation.isPartOf | APPLIED PHYSICS LETTERS | - |
dc.title | High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | - |
dc.identifier.doi | 10.1063/1.2803219 | - |
dc.author.google | "Lim, SJ | - |
dc.author.google | Kwon, SJ | - |
dc.author.google | Kim, H | - |
dc.author.google | Park, JS" | - |
dc.relation.volume | 91 | - |
dc.relation.issue | 18 | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.91, no.18 | - |
dc.identifier.wosid | 000250643600097 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.number | 18 | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 91 | - |
dc.contributor.affiliatedAuthor | Kwon, SJ | - |
dc.contributor.affiliatedAuthor | Kim, H | - |
dc.identifier.scopusid | 2-s2.0-35649020699 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 126 | - |
dc.type.docType | Article | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
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