Development of Roll Micromold System via Deep X-ray Lithography and Metal Electroforming Processes

Abstract

In the present study, a novel roll-shaped micromold system, referred to as a roll micromold system (RMS), is proposed and developed by a deep X-ray lithography process and subsequent electroforming. The developed RMS consists of several cylindrical roll micromold modules (RMMs) including various cross-sectional microstructures along their circumferential surface. RMMs with different microstructures are assembled to construct the RMS, which can be utilized in roll-type micromolding processes for the continuous replication of more complicated microstructured sheets and/or films. As a representative example of an RMS, several copper RMMs having triangular, rectangular, and trapezoidal microstructures on their circumferential surface were precisely fabricated. The RMS was successfully obtained by assembling such RMMs. A rolling experiment utilizing the assembled RMS was also carried out to verify its usefulness. (C) 2010 The Japan Society of Applied Physics