A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs
SCIE
SCOPUS
- Title
- A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs
- Authors
- Kim, BI; Jeong, S; Shin, J; Koo, J; Chae, J; Lee, S
- Date Issued
- 2009-05
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Abstract
- Simulation has drawn much attention as an analysis tool because it is often the only tool that has the capability of modeling the details of the semiconductor lines. However, building a simulation model of a semiconductor line is time-consuming and error-prone because of the complexity of the line. This paper proposes a generic simulation modeling framework to reduce the simulation model build time. The framework consists of a layout modeling software called AutoLay and a data-driven generic simulation model called AutoLogic. It can be used to develop an integrated simulation model of production processes and material handling processes in a short period of time. Early users of our framework reported that the initial model building time was reduced from two weeks to a half day.
- Keywords
- Automated material handling system; AutoMod; generic simulation model; layout; WAFER-FAB; SYSTEMS; OPTIMIZATION; DESIGN; AMHS; TOOL
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/26554
- DOI
- 10.1109/TSM.2009.2017624
- ISSN
- 0894-6507
- Article Type
- Article
- Citation
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, vol. 22, no. 2, page. 225 - 231, 2009-05
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