A micromechanical switch with electrostatically driven liquid-metal droplet
SCIE
SCOPUS
- Title
- A micromechanical switch with electrostatically driven liquid-metal droplet
- Authors
- Kim, J; Wenjiang Shen; Laurent Latorre; Chang-Jin Kim
- Date Issued
- 2002-04-01
- Publisher
- Elsevier
- Abstract
- This paper presents the use of a microscale liquid-metal droplet as a contact and moving part in a micromechanical switch with electrostatic actuation. Design, FEM analysis, fabrication and testing of the device are reported. The droplet is driven by a given voltage bias that induces electrostatic force between a grounded liquid-metal and an imbedded actuation electrode. The electrodes and the liquid-metal droplet are placed inside of an anisotropically etched silicon cavity. A novel technique to make shadow masks utilizing thin wafers is used to pattern the electrodes inside the silicon cavity. (C) 2002 Elsevier Science B.V. All rights reserved.
- Keywords
- liquid-metal; shadow mask; electrostatic force; microswitch; droplet switch; MERCURY MICRODROP
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/26571
- DOI
- 10.1016/S0924-4247(02)00022-5
- ISSN
- 0924-4247
- Article Type
- Article
- Citation
- SENSORS AND ACTUATORS A-PHYSICAL, vol. 97-98, page. 672 - 679, 2002-04-01
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