DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, H | - |
dc.contributor.author | Kim, SB | - |
dc.contributor.author | Yi, C | - |
dc.contributor.author | Park, S | - |
dc.contributor.author | Yoo, SJ | - |
dc.contributor.author | Cho, M | - |
dc.contributor.author | Namkung, W | - |
dc.date.accessioned | 2016-04-01T08:05:56Z | - |
dc.date.available | 2016-04-01T08:05:56Z | - |
dc.date.created | 2015-02-13 | - |
dc.date.issued | 2015-02 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.other | 2015-OAK-0000031953 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/27215 | - |
dc.description.abstract | An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4-1 mTorr and microwave power of 300-800 W. Electron temperature and ion density are dependent on the radial and axial position. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | IOP publishing | - |
dc.relation.isPartOf | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.title | Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas | - |
dc.type | Article | - |
dc.contributor.college | 첨단원자력공학부 | - |
dc.identifier.doi | 10.1088/0963-0252/24/1/015031 | - |
dc.author.google | Lee H. | - |
dc.author.google | Kim S.B. | - |
dc.author.google | Yi C. | - |
dc.author.google | Park S. | - |
dc.author.google | Yoo S.J. | - |
dc.author.google | Cho M. | - |
dc.author.google | Namkung W. | - |
dc.relation.volume | 24 | - |
dc.relation.issue | 1 | - |
dc.relation.startpage | 15031 | - |
dc.relation.lastpage | 15031 | - |
dc.contributor.id | 10151947 | - |
dc.relation.journal | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.24, no.1, pp.15031 - 15031 | - |
dc.identifier.wosid | 000348298200032 | - |
dc.date.tcdate | 2018-03-23 | - |
dc.citation.endPage | 15031 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 15031 | - |
dc.citation.title | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.citation.volume | 24 | - |
dc.contributor.affiliatedAuthor | Cho, M | - |
dc.identifier.scopusid | 2-s2.0-84921741171 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.scptc | 0 | * |
dc.date.scptcdate | 2018-05-121 | * |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | plasma confinement | - |
dc.subject.keywordAuthor | Langmuir probe | - |
dc.subject.keywordAuthor | ECR plasma | - |
dc.subject.keywordAuthor | low operating pressure | - |
dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
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