The nanoporous structure of anodic aluminum oxide fabricated on the Au/Nb/Si substrate
SCIE
SCOPUS
- Title
- The nanoporous structure of anodic aluminum oxide fabricated on the Au/Nb/Si substrate
- Authors
- Zhao, XW; Lee, UJ; Seo, SK; Lee, KH
- Date Issued
- 2009-05-05
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- We have studied the anodization behavior of an Al film evaporated on the Au/Nb/Si substrate and demonstrated an effective approach to fabricate the through-hole anodic aluminum oxide (AAO) template on the conducting substrate. The smoothness of the initial metal films and an appropriate wet etching of the oxide film anodized in the first step were found to be critical factors for successfully anodizing the Al film on Au surface. The barrier layer of the obtained AAO structure presented a convex and thinner characteristic, and the underlying Au surface became porous after the anodization. This phenomenon was similar to the case of anodizing the Al film on an ITO glass substrate and could be explained reasonably by the effect of high pressure O-2 gas impelling and H+ etching at the interface of the barrier oxide and the Au layer. Crown Copyright (C) 2008 Published by Elsevier B.V. All rights reserved.
- Keywords
- Anodic aluminum oxide; Barrier layer; Anodization; Etching; Interface; SI SUBSTRATE; IN-SITU; CARBON NANOTUBES; NANOWIRE ARRAYS; NANODOT ARRAYS; POROUS ALUMINA; AAO TEMPLATE; FILMS; GROWTH; SILICON
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/28144
- DOI
- 10.1016/j.msec.2008.09.042
- ISSN
- 0928-4931
- Article Type
- Article
- Citation
- MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, vol. 29, no. 4, page. 1156 - 1160, 2009-05-05
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.