GAS-PHASE SYNTHESIS OF AIN POWDERS FROM ALCL3-NH3-N2
SCIE
SCOPUS
- Title
- GAS-PHASE SYNTHESIS OF AIN POWDERS FROM ALCL3-NH3-N2
- Authors
- LEE, KH; PARK, JR; RHEE, SHI WOO
- Date Issued
- 1993-01-01
- Publisher
- KLUWER ACADEMIC PUBL
- Abstract
- Aluminium nitride powders were synthesized by the gas-phase reaction of AlCl3-NH3-N2 system. The yield of AlN powders from AlCl3 and their crystallinity increased as the reaction temperature and the mole ratio of NH3/AlCl3 were increased. AlN powders were also formed outside the reactor and their crystallinity was amorphous. The yield of AlN powders was as high as 80% when the reactor temperature was 1000 °C and the mole ratio of NH3/AlCl3 was 8. Most of the HCl by-product was recovered as NH4Cl outside the reactor. Powder characteristics, such as shape, size distribution and crystallinity, were also studied.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/29242
- DOI
- 10.1007/BF00349033
- ISSN
- 0022-2461
- Article Type
- Article
- Citation
- JOURNAL OF MATERIALS SCIENCE, vol. 28, no. 1, page. 57 - 64, 1993-01-01
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