DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, IH | - |
dc.contributor.author | Kim, KS | - |
dc.contributor.author | Kim, SH | - |
dc.contributor.author | Lee, SR | - |
dc.date.accessioned | 2016-04-01T09:02:14Z | - |
dc.date.available | 2016-04-01T09:02:14Z | - |
dc.date.created | 2009-03-05 | - |
dc.date.issued | 1996-12-15 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.other | 1997-OAK-0000011037 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/29316 | - |
dc.description.abstract | A high density helicon wave plasma was used to synthesize a thin film of cubic boron nitride (c-BN) on the Si(100) substrate. Borazine (B3N3H6) vapor was directly introduced into the reaction chamber where the plasma density was greater than 10(10)-10(11) cm(-3). The plasma density high enough to dissociate borazine effectively resulted in depositing a relatively good stoichiometric BN film without additional nitrogen sources. The bombardment of energetic ions with a high flux and energy is necessary for the growth of c-BN. The BN him synthesized at the condition of plasma density and rf substrate bias of 8.5 x 10(10) cm(-3) and - 350 V, respectively, was confirmed to be of cubic phase by both the FT-IR and TEM analyses. However, there existed an excessive compressive residual stress of 4-8 G-Pa in the c-BN film, which resulted in poor adhesion. The adhesion of c-BN film was significantly improved without a phase transformation through the post-heat treatment at 800 degrees C in N-2 atmosphere to relax the compressive residual stress. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA LAUSANNE | - |
dc.relation.isPartOf | THIN SOLID FILMS | - |
dc.subject | boron nitride | - |
dc.subject | helicon wave plasma | - |
dc.subject | phase transformation | - |
dc.subject | PULSED-LASER DEPOSITION | - |
dc.subject | THIN-FILMS | - |
dc.subject | VAPOR-DEPOSITION | - |
dc.subject | IRRADIATION | - |
dc.title | Synthesis of cubic boron nitride films using a helicon wave plasma and reduction of compressive stress | - |
dc.type | Article | - |
dc.contributor.college | 신소재공학과 | - |
dc.identifier.doi | 10.1016/S0040-6090(96)09194-8 | - |
dc.author.google | KIM, IH | - |
dc.author.google | KIM, KS | - |
dc.author.google | KIM, SH | - |
dc.author.google | LEE, SR | - |
dc.relation.volume | 290 | - |
dc.relation.startpage | 120 | - |
dc.relation.lastpage | 125 | - |
dc.contributor.id | 10077433 | - |
dc.relation.journal | THIN SOLID FILMS | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Conference Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | THIN SOLID FILMS, v.290, pp.120 - 125 | - |
dc.identifier.wosid | A1996WB81900025 | - |
dc.date.tcdate | 2019-02-01 | - |
dc.citation.endPage | 125 | - |
dc.citation.startPage | 120 | - |
dc.citation.title | THIN SOLID FILMS | - |
dc.citation.volume | 290 | - |
dc.contributor.affiliatedAuthor | Kim, SH | - |
dc.identifier.scopusid | 2-s2.0-0030408643 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 23 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordPlus | PULSED-LASER DEPOSITION | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | VAPOR-DEPOSITION | - |
dc.subject.keywordPlus | IRRADIATION | - |
dc.subject.keywordAuthor | boron nitride | - |
dc.subject.keywordAuthor | helicon wave plasma | - |
dc.subject.keywordAuthor | phase transformation | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
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