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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이재웅 | - |
| dc.contributor.author | 서용덕 | - |
| dc.contributor.author | 김오현 | - |
| dc.contributor.author | 최보경 | - |
| dc.contributor.author | 김희상 | - |
| dc.date.accessioned | 2017-07-18T13:04:34Z | - |
| dc.date.available | 2017-07-18T13:04:34Z | - |
| dc.date.created | 2009-03-26 | - |
| dc.date.issued | 1998-01 | - |
| dc.identifier.issn | 1016-9288 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/30348 | - |
| dc.language | Korean | - |
| dc.publisher | 대한전자공학회 | - |
| dc.relation.isPartOf | 전자공학회지 | - |
| dc.title | 싱크로트론 X선 근접 리소그래피에 의하여 전사 되어진 라인의 폭에 대한 에어리얼 이미지 시뮬레이션 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | 전자공학회지, v.35, no.2, pp.164 - 171 | - |
| dc.citation.endPage | 171 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 164 | - |
| dc.citation.title | 전자공학회지 | - |
| dc.citation.volume | 35 | - |
| dc.contributor.affiliatedAuthor | 김오현 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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- 김오현KIM, OHYUN
- Dept of Electrical Enginrg