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HEMT 소자제작을 위한 GAAS/ALGAAS 층의 선택적 건식식각
- Title
- HEMT 소자제작을 위한 GAAS/ALGAAS 층의 선택적 건식식각
- Date Issued
- 1991-11
- Publisher
- .
- ISSN
- 1016-135X
- Article Type
- Article
- Citation
- JOURNAL OF KITE, no. 11, page. 28 - 40, 1991-11
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Related Researcher
- 김범만KIM, BUM MAN
- Dept of Electrical Enginrg