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Improved Thermal Stability and Lower Sheet Resistance of NiSi with Carbon Pre-silicidation Implant
- Title
- Improved Thermal Stability and Lower Sheet Resistance of NiSi with Carbon Pre-silicidation Implant
- Date Issued
- 2018-02-06
- Publisher
- KCS
- Article Type
- Conference
- Citation
- 제25회 한국반도체학술대회 (KCS 2018), 2018-02-06
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Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg