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3D metamaterials and metadevices by ultra-accurate and precise electron beam lithography overlay

Title
3D metamaterials and metadevices by ultra-accurate and precise electron beam lithography overlay
Authors
RHO, JUNSUKKIM, INKIYOON, GWANHOSO, SUNAEMUN, JUNGHOKIM, MINKYUNG
Date Issued
2017-05-26
Publisher
SPP
URI
https://oasis.postech.ac.kr/handle/2014.oak/43096
Article Type
Conference
Citation
the 8th International Conference on Surface Plasmon Photonics (SPP8), 2017-05-26
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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