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Nanopore Imprinting in Spin-On Dielectric Polymers with Star-Shape Six-Armed Porogens
- Title
- Nanopore Imprinting in Spin-On Dielectric Polymers with Star-Shape Six-Armed Porogens
- Date Issued
- 2009-02-16
- Publisher
- RIKEN and Spring-8
- Article Type
- Conference
- Citation
- 1st Workshop on FEL Science: Coherent Intense X-rays in Physics and Biology, 2009-02-16
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry