Full metadata record
DC Field | Value | Language |
dc.contributor.author | 최희철 | - |
dc.contributor.author | 변혜령 | - |
dc.date.accessioned | 2018-05-23T15:46:39Z | - |
dc.date.available | 2018-05-23T15:46:39Z | - |
dc.date.created | 2010-08-10 | - |
dc.date.issued | 2007-11-27 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/47044 | - |
dc.publisher | Material research societ | - |
dc.relation.isPartOf | 2007 MRS Fall Meeting | - |
dc.title | Carbon nanotube-induced chemical etching of SiO2 layer for sub-10 nm lithography and its mechanism study | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 2007 MRS Fall Meeting | - |
dc.citation.conferenceDate | 2007-11-26 | - |
dc.citation.title | 2007 MRS Fall Meeting | - |
dc.contributor.affiliatedAuthor | 최희철 | - |
dc.contributor.affiliatedAuthor | 변혜령 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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