Selective sub-10 nm etching of SiO2 layer by carbothermal reduction using single walled carbon nanotubes
- Title
- Selective sub-10 nm etching of SiO2 layer by carbothermal reduction using single walled carbon nanotubes
- Authors
- 최희철; 변혜령
- Date Issued
- 2007-03-26
- Publisher
- Americal Chemical Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/47056
- Article Type
- Conference
- Citation
- 2007 Americal Chemical Society Spring Meeting, 2007-03-26
- Files in This Item:
- There are no files associated with this item.
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