Fabrication of deep sub-wavelength 3D metamaterials and metadevices using ultra-high accurate and precise electron beam lithography overlay process
- Title
- Fabrication of deep sub-wavelength 3D metamaterials and metadevices using ultra-high accurate and precise electron beam lithography overlay process
- Authors
- 노준석; 김인기; 윤관호; 소순애; 문정호; 김민경
- Date Issued
- 2016-11-17
- Publisher
- 경남신문
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/48261
- Article Type
- Conference
- Citation
- The 3rd International Conference & exhibition for Nanotechnology (NANOPIA 2016), 2016-11-17
- Files in This Item:
- There are no files associated with this item.
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