Thesis
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최보경 | en_US |
| dc.date.accessioned | 2015-02-24T14:38:22Z | - |
| dc.date.available | 2015-02-24T14:38:22Z | - |
| dc.date.issued | 1998 | en_US |
| dc.identifier.other | OAK-2015-02461 | en_US |
| dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899614 | en_US |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/4841 | - |
| dc.description | Doctor | en_US |
| dc.language | kor | en_US |
| dc.publisher | 포항공과대학교 | en_US |
| dc.rights | BY_NC_ND | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
| dc.title | 포항가속기를 이용한 X-선 리소그래피 시스템의 설치와성능평가 | en_US |
| dc.title.alternative | Integration and Characterization of and X-rayLithography System at PAL | en_US |
| dc.type | Thesis | en_US |
| dc.contributor.college | 일반대학원 전자전기공학과 | en_US |
| dc.date.degree | 1998-02 | en_US |
| dc.type.docType | Thesis | - |
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