Scaling and universal law for high pressure cold plasma breakdown at radiofrequency and microwave
- Title
- Scaling and universal law for high pressure cold plasma breakdown at radiofrequency and microwave
- Authors
- 이민욱; 윤건수
- Date Issued
- 2016-09-28
- Publisher
- The Korean Vacuum Society
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/48681
- Article Type
- Conference
- Citation
- The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016), 2016-09-28
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.