Enhancement of Cleaning Efficiency by Geometrical Confinement of Plasma Expansion in the Laser Shock Cleaning Process for Nanoscale Contaminant Removal
- Title
- Enhancement of Cleaning Efficiency by Geometrical Confinement of Plasma Expansion in the Laser Shock Cleaning Process for Nanoscale Contaminant Removal
- Authors
- 오령석; 김동식; 장덕석
- Date Issued
- 2009-01-26
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/51107
- Article Type
- Conference
- Citation
- 2008 SPIE Photonics West, 2009-01-26
- Files in This Item:
- There are no files associated with this item.
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