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In-situ synchrotron X-ray scattering study on the initial structure of Ru-metal Atomic Layer Deposition films for the electronic devices
- Title
- In-situ synchrotron X-ray scattering study on the initial structure of Ru-metal Atomic Layer Deposition films for the electronic devices
- Publisher
- 2009 MRS Spring Meeting
- Article Type
- Conference
- Citation
- 2009 MRS Spring Meeting
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg