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dc.contributor.author김형준-
dc.contributor.author김우희-
dc.contributor.author이한보람-
dc.date.accessioned2018-06-15T06:52:13Z-
dc.date.available2018-06-15T06:52:13Z-
dc.date.created2009-07-29-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/51663-
dc.publisherCalifornia USA 2009-
dc.relation.isPartOf(ALD 2009) 9th International Conference on Atomic Layer Deposition-
dc.relation.isPartOfAREA SELECTIVE ATOMIC LAYER DEPOSITION OF TRANSITION METALS-
dc.titleArea Selective Atomic Layer Deposition of Transition Metals-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.bibliographicCitation(ALD 2009) 9th International Conference on Atomic Layer Deposition-
dc.citation.conferenceDate2009-07-20-
dc.citation.title(ALD 2009) 9th International Conference on Atomic Layer Deposition-
dc.contributor.affiliatedAuthor김형준-
dc.contributor.affiliatedAuthor김우희-
dc.contributor.affiliatedAuthor이한보람-
dc.description.journalClass1-
dc.description.journalClass1-

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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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