Full metadata record
DC Field | Value | Language |
dc.contributor.author | 김형준 | - |
dc.contributor.author | 김우희 | - |
dc.contributor.author | 이한보람 | - |
dc.date.accessioned | 2018-06-15T06:52:13Z | - |
dc.date.available | 2018-06-15T06:52:13Z | - |
dc.date.created | 2009-07-29 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/51663 | - |
dc.publisher | California USA 2009 | - |
dc.relation.isPartOf | (ALD 2009) 9th International Conference on Atomic Layer Deposition | - |
dc.relation.isPartOf | AREA SELECTIVE ATOMIC LAYER DEPOSITION OF TRANSITION METALS | - |
dc.title | Area Selective Atomic Layer Deposition of Transition Metals | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | (ALD 2009) 9th International Conference on Atomic Layer Deposition | - |
dc.citation.conferenceDate | 2009-07-20 | - |
dc.citation.title | (ALD 2009) 9th International Conference on Atomic Layer Deposition | - |
dc.contributor.affiliatedAuthor | 김형준 | - |
dc.contributor.affiliatedAuthor | 김우희 | - |
dc.contributor.affiliatedAuthor | 이한보람 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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