Full metadata record
DC Field | Value | Language |
dc.contributor.author | 박찬경 | - |
dc.contributor.author | 이한보람 | - |
dc.contributor.author | 구길호 | - |
dc.contributor.author | 손종역 | - |
dc.contributor.author | 김형준 | - |
dc.date.accessioned | 2018-06-15T07:21:26Z | - |
dc.date.available | 2018-06-15T07:21:26Z | - |
dc.date.created | 2009-08-12 | - |
dc.date.issued | 2008-08-01 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/52202 | - |
dc.publisher | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.relation.isPartOf | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.title | Cobalt Atomic Layer Deposition for Nanoscale Contact Applications | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.citation.conferencePlace | BE | - |
dc.citation.title | 1st International Conference on Microelectronics and Plasma Technology | - |
dc.contributor.affiliatedAuthor | 박찬경 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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