Full metadata record
DC Field | Value | Language |
dc.contributor.author | 이진원 | - |
dc.contributor.author | 김인호 | - |
dc.contributor.author | 김의재 | - |
dc.date.accessioned | 2018-06-18T03:02:59Z | - |
dc.date.available | 2018-06-18T03:02:59Z | - |
dc.date.created | 2012-03-19 | - |
dc.date.issued | 2011-06-15 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/59936 | - |
dc.publisher | Clean tech | - |
dc.relation.isPartOf | Nanotech 2011 | - |
dc.title | Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | Nanotech 2011 | - |
dc.citation.conferencePlace | US | - |
dc.citation.title | Nanotech 2011 | - |
dc.contributor.affiliatedAuthor | 이진원 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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