Damage free removal of 10nm contaminant particles from a wafer surface using a supersonic CO2 particle beam
- Title
- Damage free removal of 10nm contaminant particles from a wafer surface using a supersonic CO2 particle beam
- Authors
- 이진원; 김인호
- Date Issued
- 2011-06-02
- Publisher
- 대한기계학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/59945
- Article Type
- Conference
- Citation
- US-Korea Joint Symposium on nano technology, 2011-06-02
- Files in This Item:
- There are no files associated with this item.
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