Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope
- Title
- Locking Actuator of Comb Electrode for Enhanced Sensitivity of Vibrating MEMS Gyroscope
- Authors
- 임근배; 석세영; 성중우; 권혁진; 김민서
- Date Issued
- 2012-09-23
- Publisher
- JCK MEMS
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/63005
- Article Type
- Conference
- Citation
- JCK MEMS, 2012-09-23
- Files in This Item:
- There are no files associated with this item.
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