A high precision MEMS resonant accelerometer based on robust structural design
- Title
- A high precision MEMS resonant accelerometer based on robust structural design
- Authors
- 김준원; 박우성; 백승범; 전종업; 송진우
- Date Issued
- 2012-07-10
- Publisher
- IEEE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/64615
- Article Type
- Conference
- Citation
- APCOT 2012, 2012-07-10
- Files in This Item:
- There are no files associated with this item.
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