Bulge 실험을 통한 티타늄 박막의 기계적 물성 측정

Abstract

In this study, the mechanical properties of titanium thin film are investigated. Freestanding film of titanium is fabricated using the standard micro-machining techniques. Titanium thin film were deposited in a RF magnetron sputtering system on the Si(100) wafers containing a layer of silicon oxide. Specimens were prepared on 8 Ⅹ 2 ㎜ rectangular membrane window 21 Ⅹ 21 ㎜ frame. Titanium thin film were deposited by 1.0, 1.5 and 2.0 ㎛ thickness. And annealing was performed at 150, 300 and 600 s for 600 ℃. Mechanical properties of these membranes are measured by the plane-strain bulge test method. The plane-strain bulge test is a powerful new technique for measuring the mechanical properties of thin films. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus, residual stress and yield stress at a 0.2 % offset.