3D Evaluation of the Dopant Distribution in NVM Structures using Atom Probe Tomography
- Title
- 3D Evaluation of the Dopant Distribution in NVM Structures using Atom Probe Tomography
- Authors
- 박찬경; 이지현; 김영태
- Date Issued
- 2013-10-29
- Publisher
- KVS
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/67020
- Article Type
- Conference
- Citation
- SIMS-19, 2013-10-29
- Files in This Item:
- There are no files associated with this item.
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