Quantitative Analysis on the Dopant(As) Distribution in Real 3D FinFET Devices
- Title
- Quantitative Analysis on the Dopant(As) Distribution in Real 3D FinFET Devices
- Authors
- 박찬경; 장동현
- Date Issued
- 2014-08-31
- Publisher
- IFES
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/68795
- Article Type
- Conference
- Citation
- APT&M, 2014-08-31
- Files in This Item:
- There are no files associated with this item.
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